Pulsed Laser Deposition (PLD) Systems

Product Description

1. High-Vacuum Deposition Chamber:
– Spherical chamber made from electro-polished 304 stainless steel.
– Multiple ports for target carousel, substrate heater, turbo pump and gate valve, viewports, laser port, and additional accessories.
– Leak-tested to 10⁻⁹ mbar·L/sec He; achieves ultra-high vacuum (UHV) levels of 5×10⁻⁷ Torr or better.
– Bakeable up to 150°C to minimize outgassing and leaks
– Adjustable chamber orientation for adjustable laser input.

2. System Framework:
– A robust clean room-grade frame designed for holding the chamber and system components.
– Integrated rackmount mounting for electronics, power distribution, and control systems.
– Equipped with mobility and leveling features for easy installation and adjustment.

3. Chamber Pumping:
– Includes an integrated Turbo Pump.
– Includes a mechanical dry pump serving as a backing pump to achieve a rough vacuum.
– Includes all relevant hardware, vacuum plumbing, and valves necessary for pumping and venting operations.
– Maximum reliability within a compact design.
– High pumping speed and maximum compression for all gases.
– Integrated drive electronics, appropriate for industrial settings.
– Continuous monitoring of operational data.

4. Dry Mechanical Pump:
– Oil-free scroll pump to prevent any hydrocarbon oil fumes that could contaminate the process.
– Oil-free maintenance for the pump.

5. Gas Flow and Pressure Control:
– Includes an enclosure that houses the system’s mass flow controllers (MFCs) and interfaces with the user’s exhaust system to mitigate any potential gas leaks.
– Blue Wave Semiconductor provides a tailored selection of MFCs for users to select from. (Please see the specification table)
– All MFCs are constructed with gas shut-off valves for an overpressure safety shut-off feature.
– A combination of gas flow and vacuum pumping is utilized to achieve the desired chamber pressure.
– Contains over-pressure safety protection.

6. Vacuum Gauge:
– Includes a full range vacuum gauge and a process vacuum gauge.
– The full range gauge measures from atmospheric pressure to 10⁻⁹ Torr.
– The process gauge enables accurate pressure measurements during operation.
– Both gauges contain a digital pressure readout.
– Includes all mounting hardware and cables.
– Easy to operate and clean, resisting metal and oxide contamination over extended use.

7. Target Carousel:
– Motorized six-position carousel allows multiple targets without venting the chamber.
– Targets rotate and raster for uniform laser ablation.
– Target clamps minimize contamination and eliminate the need for silver paste.

8. Deposition Process Pressure Automation:
– The substrate heater operates at a maximum temperature of 950˚C, with a temperature uniformity of within 10%. Additionally, it includes a stainless-steel shield equipped with six 4-40 tapped holes for sample clamping.
– The substrate heater element is sealed against exposure to reactive gases and plasma deposition.
– Includes a Blue Wave temperature controller that precisely manages the substrate heater temperature and provides it with power while providing the temperature readings.

9. Substrate Holder:
– Fully adjustable optics mount for height, angle, and distance relative to the target.
– Supports a variety of lenses to meet specific deposition requirements.

10. Deposition Process Pressure Automation:
Includes a computer equipped with custom software, which includes, but is not limited to:
• Gas flow control and monitoring
• Pressure control and monitoring
• Vacuum measurements
• Target Carousel Control and monitoring
• Temperature control and measurement of the substrate heater
• Adjustable safety interlocks

Optional Upgrades

OP-1. Additional Gas/Mass Flow Controller:
– The user may add up to 4 additional MFCs into the system. The gases associated with the MFCs may include, but are not limited to, Nitrogen (N₂), Argon (Ar), and additional gases.
– Contact Blue Wave for additional mass flow controller selection.

OP-2. Rotation Speed Adjustment:
– Enables the substrate holder to operate at variable speeds.

OP-3. Two-Color IR Pyrometer for Sample Temperature Measurement:
– A two-color infrared pyrometer designed for temperature monitoring via optical fiber, featuring a bright LED digital display. It is ideally suited for highly precise measurement of MPCVD sample temperatures. The device offers exceptional speed and accuracy, with a response time of 10 milliseconds and an accuracy of 0.2% of the full scale.

OP-4. Load Lock Wafer Transfer Mechanism:
– A chamber isolated with a gate valve that allows for in-situ sample transfer.
– Contains an additional vacuum gauge for load lock pressure readings.
– Contains a sample loading arm.

OP-5. Add Sputtering, Electron Beam Evaporator, or Thermal Evaporator:
– The PLD chamber can integrate with other CVD systems. Contact Blue Wave Semiconductor for more information.

OP-6. Add Laser:
– The Blue Wave PLD system can work with multiple types of lasers. The two common lasers used for the PLD system are an excimer laser and a solid-state laser. Blue Wave can find the best laser to fit the customers’ needs or the customer can purchase the laser separately.