PLD Target Carousel
The BWS Target Carousel is a fully customizable state-of-the-art system accessory designed for high-precision PLD and CVD processes. This advanced system features motorized target indexing, target rotation, and target rastering, alongside target adjustment. With six target stages, it provides exceptional flexibility, enabling seamless multi-material deposition.
The system is optimized for reproducible film deposition, with rotation of targets ensuring superior uniformity, making it ideal for high-throughput applications in advanced materials research and manufacturing. To ensure uniform film properties, the Target Carousel employs a programed motor to raster and rotate a target, ensuring even distribution.
Applications
1. PLD System
2. Multi-target deposition
3. Precise and effective processing
4. Material customization
5. Reduced manual handling
- Description
- Specification
- Brochure
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Product Description
1.1 Target Carousel
The Target Carousel consists of six different targets and is mounted on an 8-inch CF flange. The system includes two motors: one for the rotation of the six targets and the other for target selection. It is built with a ferrofluidic dual-axis rotary feedthrough, two feedthroughs and ports, offering remarkable robustness and reliability while minimizing maintenance and maintaining high vacuum. This design ensures long-lasting performance, outlasting traditional bellows-style feedthroughs. Changing targets is quick and efficient, with minimal downtime, and the six-target configuration helps save time. The target Carousel consists of a shield for the remaining 5 targets while one of the targets is in the deposition process to remove any impurity or cross contamination from the deposition.
1.2 Target Control Interface
The interface is housed in a 1u rackmount enclosure, which contains a knob for selecting the target to be used for deposition. Another button controls the rastering of the target, ensuring an even film deposition. A switch for clockwise and counterclockwise adjustment is also located on the face of the rackmount enclosure, enabling better rotational motion of the target.
Product Specification
| Specification | Parameter |
|---|---|
| Number of targets | Six |
| Dimensions | Mounted on 8in Cf Flange with a height ranging from 6 to 12 inches |
| Power | One 120VAC power source is required |
For more information, Contact Blue Wave.
Brochure
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Photos
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Videos
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