Inconel Substrate Heater
A substrate heater is required for thin film deposition to crystallize a film during deposition. BWS developed substrate heater stages for PLD, sputter, e-beam, CVD, MPCVD, etc. The BWS Substrate Heater is a fully customizable and highly cost-effective solution, designed to provide exceptional uniformity in high-precision temperature control for both thin film research and industrial applications. Engineered for environments where consistent heat distribution is crucial, this heater excels in processes such as pulsed laser deposition (PLD), reactive sputtering, chemical vapor deposition (CVD), and thermal and e-beam evaporation. Its compatibility with a wide range of gases, including O₂, NH₃, SiH₄, CH₄ and H₂S further enhances its versatility, making it an ideal choice for diverse thin film applications.
With a maximum operating temperature of 850°C and vacuum compatibility down to 10⁻⁸ Torr, this heater is ideally suited for any deposition technique with operation processes from ultra-high vacuum (UHV) to high pressures (up to 1 atm) systems. The Inconel alloy construction provides exceptional resistance to oxidation, corrosion, and chemical degradation, ensuring reliable performance in high-performance, precision-driven processes. Its customizable size options, ranging from 1” to 8” in diameter, offer flexibility for a variety of applications. Additionally, the integrated PID-controlled temperature controller and power supply ensure precise and consistent temperature regulation, further enhancing the heater’s reliability and effectiveness.
Applications
1. Thin film deposition
2. Vacuum Annealing, Doping
3. Catalytic Reaction
4. In-Situ Surface Science, R & D
5. Gas Sensor Temperature-dependent Characterization
6. Epitaxy of Oxides, Nitrides, Carbides, Metals
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Product Description
Heater Base
The heater part is securely positioned within the heater base holder, which features adjustable mounts that function as clamps, allowing for easy loading and filament replacement. Both the base and the heater are constructed from Inconel material, ensuring superior resistance to oxidation and corrosion, even under high-temperature and harsh environmental conditions. This robust design guarantees long-lasting durability and consistent performance in demanding applications.
Product Specification
| Specification | Parameter |
|---|---|
| Operating Temperature Range | 0 to 850°C (1562°F) |
| Vacuum Compatibility | Able to operate at ultra-high vacuum (UHV) down to 10⁻⁸ Torr to 1atm |
| Material | Oxidation, corrosion, and chemical resistant Nickel alloy (high-temperature, high-strength material) |
| Size Option | 1”, 1.6”, 2,2”, 3.1”, 4.1”, 6.1”and 8.1”. |
| Power Supply | PID-controlled with 110V-220V input |
| Temperature Sensor | Integrated K-type thermocouple with extended flexible and insulated thermocouple wires for accurate temperature monitoring |
| Electrical Conductivity | Flexible glass fiber insulated wire conductors for safe and efficient power delivery |
| Substrate Clamping | Inconel collar with tapped holes for secure substrate clamping during heating |
| Heating Element Protection | Collar designed to protect the heating element from environmental exposure |
| Gas Compatibility | – O₂ – NH₃ – SiH₄ – CH₄ – other chemical vapors for various deposition techniques |
Brochure
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