The BWS Laser Reflectance Interferometer is a tool designed to give real time information into the growth of thin films. The machine is designed to work with BWS HFCVD and PLD, though it can be configured to work with any deposition system with sight lines to the substrate. The tool is designed to work with diamond, oxides, and other optical thin films.
- In-situ film thickness measurments
- Real analysis of film quality
- Determination of start of film growth