Substrate Heaters and Power Supply Inquiries
A: Yes. Blue Wave Semiconductors manufactures two types of substrate heaters to provide the best result in both environments. The oxygen and vacuum environment compatible Inconel 600 heater products are the best choice for depositions under 850ºC (can be taken to 900ºC for shorter periods of time under 30 minute operations). The Boron Nitride substrate heater products can be taken to temperatures up to 1100ºC. BN substrate heater is an excellent choice for use in vacuum environments or wherein inert gases are used during deposition processes. BN heaters are not recommended for oxidization deposition processes.
A: Yes. The Inconel 600 unit is compatible with most of the reactive gases such as SiH4, NH3, O2, etc.
A: Blue Wave Semiconductors saves you time by offering in-house substrate heater mounting to the CF Flange size of your choice.
A: Blue Wave Semiconductors is a leader in supplying well designed and process compatible substrate heaters to our customers working in the areas of electronics grade thin films and device technologies. There is a lot of innovative engineering and component manufacturing behind our product which we consider the basis for maintaining a high quality standard for our line of products and most importantly, our research and development customers. We also provide a 1 year guarantee on our substrate heaters and accessories such as power supplied feedthroughs, etc. which normally last well over the guaranteed period.
A: The substrate heater units are normally shipped out 1 – 4 weeks following the placement of the order for the units depending upon the status of our inventory and desired customization. Power supplies are generally also shipped out within 2 weeks from the placement of the order.
A: Please contact Dr. RD Vispute for technical support by phone at the number: 301-706-8833 or by email: firstname.lastname@example.org. If you inquire by email, we will get back to you as soon as possible within 24 hours.
A: The standard substrate heater sizes most commonly available are: 1.60″, 2.2″, 3.1″, and 4.10″ outer diameters.
A: The standard substrate heaters generally range from 1 – 4lbs depending upon the desired specifications provided and the standard sizes offered. The power supply units weigh about 10 -12lbs depending upon whether you need the rack mount or general power supply unit.
Vacuum System Inquiries
Q: Can you build deposition systems similar to your HFCVD unit for other processes such as PVD, evaporation, sputtering, etc.?
A: Yes, please refer to our deposition systems section.
A: Blue Wave Semiconductors does its best in assisting its customers in selection of the type of system needed for the process whether it be Physical Vapor Deposition, Hot Filament Chemical Vapor Deposition, Chemical Vapor Deposition, Pulsed Laser Deposition, etc. We offer high quality standard systems to meet the requirements for the processes of our customers, and allow for personal preference in the customization of a system that is right for you.
Q: What kind of research goes on at Blue Wave Semiconductors?
A: Blue Wave Semiconductors, Inc. is a global leader in developing advanced thin film and nanomaterials deposition systems, tool components, and nanotechnology based electronic and photonic devices. Please see Research and Development on our website for more information.