Blue Wave is a leader in supplying versatile, well designed substrate heaters to our thin film engineering and manufacturing customers.
Blue Wave's substrate heaters are specially designed for deposition techniques such
as:
PVD,
PLD,
CVD, and many others.
The Inconel heater is
a vacuum compatible heater great for oxide based or reactive processes,
and can be taken up to a max temperature of
850°C. The Boron Nitride heater is the perfect
accessory for vacuum processes and can reach a
max temperature of up to 1000°C.
Our substrate heaters come in a variety of sizes
ranging from 1 to 6 inch heating surface areas.
Whether you are heating small substrates or full
size wafers, we can provide a heater to suit
your application.
We also provide several custom options including: substrate heater rotation, flange mounting, linear
travel, and other customer-specified designs.
Click the links above to find out more about our heaters or click the link below to get a quotation on a substrate heater for your application.
