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Facilities at BWS
Research
Facilities/Equipment/Resources at Blue Wave Semiconductors
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Electron Beam Deposition System
Blue Wave has developed its own very efficient,
high vacuum coating system. The system is equipped for thermal evaporation
deposition along with a four pocket, high
capacity electron gun as its main deposition source.
The processing chamber
has multiple ports to allow for a number of
possible coating tools and experiment
arrangements.
Also included in the system is Blue Wave’s own flange mounted substrate
heater assembly,
allowing for a wide variety of high quality,
uniform coatings with high
quality nitrides, oxides, and metals all
routinely deposited for prototyping of
electronic products.
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Pulsed Laser
Deposition
This system consists of a
high power (500mJ, 20nSec) excimer laser for
ceramic ablation and deposition, and is capable of producing high temperature
coatings, optical coatings, radiation hard
coatings, and electronic materials.
Multiple targets can be loaded inside the
chamber on Blue Wave's own custom rotating
target assembly which sequentially exposes targets to the
laser beam for the in-situ growth
of heterostructures and superlattices with
relatively clean interfaces.
We apply our
expertise in pulsed laser deposition techniques
ranging from microelectronics to photonic devices. Visit our
r & d page for more details.
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Hot Filament Chemical Vapor Deposition (HFCVD) System
The
BWS HFCVD System is
for the
fabrication of nanostructure materials and coatings
of electronic materials and high thermal conducting
materials such as diamond, diamond like carbon and
CNT. The system also has a physical vapor deposition tool for
production of nanowires of ZnMgO and other
metal-oxides.
Click the link above for more information. |
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Nano-Furnaces
Blue Wave has a custom modified Lindberg/Blue M Tube
type furnace dedicated to producing and
manufacturing nano structure materials. The furnace
includes custom machined parts as well as several
Omega Mass Flow controllers. Precise control of a
mixture of gases can be easily fed through the tube
and heated to a desired temperature for the creation
of nano structures.
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Commercial facility / Manufacturing
Computer control automated coil winding systems for manufacturing of heater
assemblies,
AutoCad and Solidworks 3d rendering software,
peripheral equipment,
manual lathe for manufacturing / preparing parts / components
and other miscellaneous tools and devices for manufacturing.
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Related Links
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