Substrate Heater Quotation Request Form Contact Information The following information will be used to process your quotation request. Your Name (required) Your Email (required) Company Name Phone Organization Deposition Techniques Please select or specify an deposition technique in which the heater will be used. Thermal Evaporation Chemical Vapor Deposition / MOCVD Vacuum Annealing Atomic Layer Deposition(ALD) Pulsed Laser Deposition Reactive Sputtering Other Applications Please select or specify an application in which the heater will be used. Polycrystalline Thin Films Epitaxial or Single Crystal Thin Films Annealing Thin Films Recrystallization of Thin Films Doping Temperature Dependant Sample Characteristics Other Growth Process Ambient The gasses used in your deposition process will determine the material your heater will be made out of and the maximum achievable temperature. Oxygen Ammonia Hydrogen Methane Silane Fluorine Chlorine Nitrogen Argon Inert Others (please specify): Heating stage diameter (*Required) Whether you are heating small substrates or full size wafers, we can provide a heater to fit your needs. 1.0 2.2 3.1 4.1 5.1 6.1 Maximum Temperature Requirement (*Required) The substrate heater can operate in a range of temperatures from room temperature to 1000C. Your temperature range can be limited by whether your processing environment contains reactive gases Room Temperature - 600 °C max. Room Temperature - 750 °C max. Room Temperature - 850 °C max. Room Temperature - 1000 °C max. (Vacuum only) Vacuum compatibility (*Required) We can supply you with a heater for high vacuum, low vacuum, and normal atomspheric pressure. 10-3 Torr - Atmospheric Pressure 10-8 Torr - Atmospheric Pressure Only High Vacuum (10-5 - 10-8 Torr) Flange Mounting For your convenience, your substrate heater can be mounted in a variety of configurations. 6" CF flange (on-center) 8" CF flange 8" Rotatable CF flange (on-center) ISO 100K (0.5" offset) None Custom Configuration: Temperature Controller Temperature controller to compliment our substrate heater's operation. BWS PS1000 (Recommended) None Questions/Comments: Feel free to submit any additional comments and questions.