Substrate Heater Quotation Request Form

    Contact Information
    The following information will be used to process your quotation request.
    *Required fields.







    Deposition Techniques
    Please select or specify an deposition technique in which the heater will be used. Learn more

    Our substrate heaters are designed for a wide variety of deposition techniques and processes. Select from the following to help us determine the best heater for your deposition.

    If the following list does not include your deposition technique, in the 'Other' field, briefly describe your deposition technique(optional).




    Applications
    Please select or specify an application in which the heater will be used. Learn more

    Our substrate heaters are designed for a wide variety of applications and processes. Select from the following to help us determine the best heater for your application.

    If the following processes do not include your application, in the 'Other' field, briefly describe your application (optional).



     

    Growth Process Ambient
    The gasses used in your deposition process will determine the material your heater will be made out of and the  maximum achievable temperature. Learn more

    Depending on your growth process ambient, the heating stage material will either be manufactured out of Boron Nitride (high vacuum, inert gasses) or Inconel (oxygen, metal-organic, or reactive gasses). The choice of material will affect the maximum achievable temperature. See 'Maximum Temperature' for more information.
    Boron Nitride Inconel

    Boron Nitride

    Boron Nitride is an excellent thermal conductor that is also electrically insulating. Boron nitride will allow for excellent heating uniformity across your substrate. The disadvantage of using Boron Nitride is that reactive gasses will attack the material at high temperatures. The material is also very soft ceramic material and is sensitive to scratching and abrasion.

    Inconel

    Inconel is an alloy material which is stable in extreme environments. When heated, the oxide that forms across the surface of the material passivates it which allows the heater to withstand exposure to reactive/corrosive atmospheres. The high nickel content gives resistance to corrosion by many organic and inorganic compounds. Chromium provides resistance to oxidizing conditions at high temperaturs. The disadvantage of using Inconel is that the temperature cannot exceed 850C, which might be limiting for some applications.
      25°C - 850°C 850°C - 1000°C
    Inert BN / Inconel BN / Inconel
    Reactive Inconel --

     


       

    Heating stage diameter (*Required)
    Whether you are heating small substrates or full size wafers, we can provide a heater to fit your needs. Learn more

    Our substrate heaters come in a variety of sizes that will allow you to heat different size substrates. The diameter corresponds to the actual heating area, not the heater itself. The surrounding collar is not heated and allows for substrate clamps to be mounted.

    If the following dimensions are not suitable for your application, in the 'Other' field, specify your desired size for the heater and we will work with you to manufacture a custom size heater.

    ø A B C
    1.6" 2.0" 1.0" --
    2.2" 3.0" 1.0" --
    3.1" 3.5" 1.0" --
    4.1" 4.7" 1.0" --
    5.1" 5.5" 1.0" --
    6.1" 6.5" 1.2" --


     



    Maximum Temperature Requirement (*Required)
    The substrate heater can operate in a range of temperatures from room temperature to 1000C. Your temperature range can be limited by whether your processing environment contains reactive gases. Learn more

    As discussed above in 'Growth Process Ambient', your substrate heater's maximum achievable temperature is determined by the type of gasses you will be using in your process. If you are using inert gasses or are working in high vacuum, your maximum temperature is limited to 1000C. If you are working with reactive gasses, your temperature will be limited to 850C.
      25°C - 850°C 850°C - 1000°C
    Inert BN / Inconel BN / Inconel
    Reactive Inconel --




    Vacuum compatibility (*Required)
    We can supply you with a heater for high vacuum, low vacuum, and normal atomspheric pressure. Learn more

    Our substrate heaters are composed of special high-temperature, oxidation and chemical resistant metal alloys with integrated high temperature, chemical resistant ceramics compatible to several levels of vacuum and also compatible with oxygen environments.



    Torr)

    Thermocouple Type
    Please select a thermocouple type. Learn more

    Our heaters incorporate K-type transition joint thermocouples for convenient probe to lead wire transitions. These thermocouples consisting of chromium-nickel and aluminum-nickel alloys are capable of withstanding high temperatures and are a relatively inexpensive solution for most general purposes.

    If you would like to find out about another thermocouple type not listed, please specify the thermocouple type in the 'Other' field.



    Flange Mounting
    For your convenience, your substrate heater can be mounted in a variety of configurations. Learn more

    Every setup is different and requires a unique mounting solution. Whether you have a stationary heater or rotating, whether you need it right-side up, or up-side down, or sideways, we would be happy to work with you to get your substrate heater mounted to your exact specifications.

    We will mount the heater on a flange you specify, provide a vacuum compatible, electrical feedthrough, and provide you with the necessary cables to get started right a way.

     







    Substrate Rotation
    Rotation option is available for uniform heating during your process. Learn more


    Substrate rotation allows for increased film uniformity when working with a process that exhibits a small deposition area. The heating element and the heater itself remains stationary while a separated stage rotates the substrate. The disadvantage of using substrate rotation is that since, the rotating stage is not thermally coupled to the heating element, there will be 5% difference in displayed temperature and actual temperature. And when working with high substrate temperatures, actual temperature might become limited as the heating element should not be pushed above a certain power.

     

    If you decide upon this option, we can work with you to provide a mounting solution for your deposition process.

     




    Linear Positioner
    A linear positioner fitted heater unit option is available.Learn more


    Linear positioning allows for enhanced film uniformity and quality when working with a process that is dependant on factors such as substrate to filament distance, etc.

    If you decide upon this option, we can work with you to provide a mounting solution for your deposition process.

     

     


    Temperature Controller
    Temperature controller to compliment our substrate heater's operation. Learn more


    The BWS power supply will provide power to your substrate heater and will precisely control the temperature within 1C. The power supply is capable of working with your regional input voltage. The power supply is capable of powering both small and large substrate heaters. The power supply is designed to work flawlessly with your substrate heater. The power supply also comes in two form factors - rackmount and desktop unit. Both are functionally identical. The unit allows for computer connectivity for further control.

    General Specifications

    Maximum Power Output

    		 1200 Watts
    Input voltage

    120V - 240V
    Output Voltage Type AC
    Control type Phase Angle Control
    Programmable Yes
    Computer Connectivity RS-232 / MODBUS
    Dimensions
    Desktop Unit 7.5" (Width), 3" (Height), 7.5" (Depth)
    Rackmount Unit 19" (Width), 5.25" / 3U (Height), 12" (Depth)



    Questions/Comments:
    Feel free to submit any additional comments and questions.